E10900 - SEMI E109 - Specification for Reticle and Pod Management (RPMS)

 This Specification provides standardized behavior for lithography, reticle inspection, and bare reticle stocker equipment. It also provides for standardized communication with lithography, reticle inspection, and bare reticle stocker equipment. This includes the coordination, execution, and completion of automated and manual reticle pod transfers to and from the equipment, transfer of reticles to and from the reticle pods, movement of the reticles within the equipment, identification and verification of both reticle pods and reticles, inspection and qualification of reticles, and other relevant information such as tracking reticle usage. This Standard covers host and equipment communication for equipment that handles reticles. This only includes equipment that handles reticles both in and outside of a reticle pod. This Specification defines standards that facilitate the host’s knowledge and role in automated and manual reticle pod transfers, reticle transfers to and from the reticle p