E12000 - SEMI E120 - COMMON EQUIPMENT MODEL 사양

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www.semiviews.org and www.semi.org in April 2014; originally published March 2003; previously published March 2010. The purpose of this Specification is to provide a generally applicable object model of semiconductor equipment structure and related elements. This object model is intended to be used in the following ways: As a guide to equipment suppliers on how to represent the external view of their equipment to the factory host. As a base model to be used and extended by other SEMI Equipment Communication Standards. As a reference for the creation of technology-specific object model definitions, such as XML schema. This Specification provides a common set of constructs that can be used by the equipment manufacturer to model their equipment structu