E12300 - SEMI E123 - Specification for Handler Equipment Specific Equipment Model (HSEM)

 This Standard establishes a Specific Equipment Model (SEM) for Handling equipment (HSEM). The SEM consists of equipment characteristics and behaviors that are applicable to this class of equipment. The intent of this Standard is to facilitate the integration of Handling equipment into an automated (semiconductor) factory. This Standard accomplishes this by defining an operational model for Handling equipment as viewed by a factory automation controller. This definition provides a standard host interface and equipment operational behavior. The scope of this Standard is limited to the definition of Handling equipment behavior as perceived by a host. It defines the view of the equipment through the equipment communications interface. It does not define the internal operation of the equipment. It includes a specific processing state model as the basis for the behavior of all equipment of this class. This Standard expands the handler equipment requirements and capabilities in the areas of