E12500 - SEMI E125 - Specification for Equipment Self Description (EqSD)

 NOTICE: By purchasing this download, you will receive the Primary Standard and the Subordinate Standards. 1  Purpose1.1  This Specification describes a method for allowing equipment suppliers to provide a description of the variables, events, exceptions, and physical equipment configuration available from their equipment. With this information available for consumption by software systems, it can be used as a tool to aid the process of integrating equipment into a factory’s automation system.2  Scope2.1  In-Scope2.1.1  This Standard specifies the classes that suppliers are to use to describe essential data, events, and exceptions provided by their equipment. This Specification only describes information that is static in nature (i.e., information that does not change dynamically while the equipment is running). This Standard also specifies an interface that Clients can use to access this information.2.1.2  This Specification applies to all semiconductor manufacturing equipment that su