E19200 - SEMI E192 - Guide for Equipment Adoption Criteria for GEM and GEM-related Standards
1 Purpose1.1 This Standard provides general guidance for implementing the SEMI E30 (GEM) Standard. It also provides general guidance for implementing the many standards built using the GEM and SEMI E5 (SECS-II) Standards.2 Scope2.1 This Standard applies to any manufacturing equipment that implement the GEM Standard and any of the Standards built on GEM and SECS-II technology.2.2 This Standard is not limited to any specific industry. The guidelines are intended to be universal. Referenced SEMI Standards (purchase separately)SEMI A3 — Specification for Printed Circuit Board Equipment Communication Interfaces (PCBECI)SEMI E4 — Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and UtilizationSEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)SEMI E30.1 — Specification for Inspection and Review Specific Equipment Model (ISEM)SEMI E30.5 — Specification for Metrology Specific Equipment Model (MSEM)SEMI E32 — Material Movement Management (MMM)SEMI E32.1 — SECS-II Support for Material MovementSEMI E37 — Specification for High-Speed SECS Message Services (HSMS) Generic ServicesSEMI E37.1 — Specification for High-Speed SECS Message Service General Session (HSMS-SS or HSMS-SSS)SEMI E37.2 — Specification for High-Speed SECS Message Service Single Selected-Session Mode (HSMS-GS)SEMI E39 — Specification for Object Services: Concepts, Behavior, and ServicesSEMI E39.1 — Specification for SECS-II Protocol for Object Services (OSS)SEMI E40 — Specification for Processing ManagementSEMI E40.1 — Specification for SECS-II Protocol for Processing ManagementSEMI E41 — Exception Management (EM) StandardSEMI E41.1 — SECS-II Support for Exception Management StandardSEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message ServicesSEMI E42.1 — Standard for SECS-II Protocol for Recipe Management Standards (RMS)SEMI E53 — Event ReportingSEMI E53.1 — SECS-II Support for Event Reporting StandardSEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior and ServicesSEMI E58.1 — SECS-II Protocol for Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior and ServicesSEMI E82 — Specification for Interbay/Intrabay AMHS SEM (IBSEM)SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O InterfaceSEMI E87 — Specification for Carrier Management (CMS)SEMI E87.1 — Specification for SECS-II Protocol for Carrier Management (CMS)SEMI E88 — Specification for AMHS Storage SEM (Stocker SEM)SEMI E90 — Specification for Substrate TrackingSEMI E90.1 — Specification for SECS-II Protocol Substrate TrackingSEMI E91 — Specification for Prober Specific Equipment Model (PSEM)SEMI E94 — Specification for Control Job ManagementSEMI E94.1 — Specification for SECS-II Protocol for Control Job Management (CJM)SEMI E99 — Specification for Carrier ID Reader/WriterSEMI E99.1 — Specification for SECS-I and SECS-II Protocol for Carrier ID Reader/WriterSEMI E109 — Specification for Reticle and Pod Management (RPMS)SEMI E109.1 — Specification for SECS-II Protocol for Reticle and Pod Management (RPMS)SEMI E116 — Specification for Equipment Performance TrackingSEMI E116.1 — Specification for SECS-II Protocol for Equipment Performance TrackingSEMI E118 — Specification for Wafer ID Reader Communication Interface – The Wafer ID Reader Functional Standard: Concepts, Behavior and ServiceSEMI E118.1 — Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communication Interface StandardsSEMI E122 — Specification for Tester Equipment Specific Model (TSEM)SEMI E122.1 — Specification for SECS-II Protocol for Tester Specific Equipment Model (TSEM)SEMI E123 — Specification for Handler Equipment Specific Equipment Model (HSEM)SEMI E123.1 — Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM)SEMI E127 — Specification for Integrated Measurement Module Communications: Concepts, Behavior and Services (IMMC)SEMI E127.1 — Specification for SECS-II Protocol for Integrated Measurement Module Communications (IMMC)SEMI E130 — Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300)SEMI E130.1 — Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)SEMI E139 — Specification for Recipe and Parameter Management (RaP)SEMI E139.1 — XML Schema for the RaP PDESEMI E139.2 — SECS-II Protocol for Recipe and Parameter Management (RaP)SEMI E142 — Specification for Substrate MappingSEMI E142.1 — Specification for XML Schema for Substrate MappingSEMI E142.2 — Specification for SECS-II Protocol for Substrate MappingSEMI E142.4 — Specification for SECS-II Protocol for Substrate Mapping using Item TransferSEMI E148 — Specification for Time Synchronization and Definition of the TS-Clock ObjectSEMI E153 — Specification for AMHS SEM (AMHS SEM)SEMI E157 — Specification for Module Process TrackingSEMI E167 — Specification for Equipment Energy Savings Mode Communications (EESM)SEMI E167.1 — Specification for SECS-II Protocol for Equipment Energy Savings Mode CommunicationsSEMI E170 — Specification for Secured Foundation of Recipe Management Systems (SFORMS)SEMI E170.1 — Specification for SECS-II Protocol for Secured Foundation of Recipe Management SystemSEMI E171 — Specification for Predictive Carrier Logistics (PCL)SEMI E171.1 — Specification for SECS-II Protocol for Predictive Carrier LogisticsSEMI E172 — Specification for SECS Equipment Data Dictionary (SEDD)SEMI E173 — Specification for XML SECS-II Message Notation (SMN)SEMI E189 — Specification for Equipment Management of Consumables and Durables (EMCD)SEMI E189.1 — Specification for SECS-II Protocol for Equipment Management of Consumables and Durables (EMCD)SEMI HB4 — Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI)SEMI PV2 — Guide for PV Equipment Communication Interfaces (PVECI) Revision HistorySEMI E192-0125 (first published)