F05700 - SEMI F57 - Specification for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems

This Standard specifies minimum performance requirements for ultra high purity (UHP) polymer materials and components suitable for conveying ultrapure water (UPW) in UPW distribution systems. Further information regarding UPW systems can be found in SEMI F61, SEMI F63.It also provides recommendations for the use of polymer materials and components used in UHP liquid chemical distribution systems (LCDS). Such distribution systems covered in this Specification include bulk supply, facility distribution, and process equipment applications.Although the requirements of this Specification focus on testing materials and components with UPW at elevated temperatures, there could be other applicable chemicals, such as caustics and oxidizers, which users of this Specification might like to consider. However, defining the vast number of testing parameters for each possible liquid chemistry stream is beyond the scope of this Specification. Nevertheless, this Specification intends neither to exclude