F12100 - SEMI F121 - Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water

 This Guide provides a performance-based definition of metrology that can be used to measure particle precursors in ultrapure water (UPW). This Guide includes a testing methodology and criteria for qualifying measurement techniques for quantifying particle precursor concentrations in UPW. Particle precursors are defined as dissolved compounds that can form particles when dried on a wafer surface. This definition was developed by the UPW International Roadmap for Devices and Systems (IRDS). Particle precursors can originate from UPW system components, such as ion exchange resin (IX resin). Critical dimensions in semiconductor manufacturing have reached levels susceptible to particle sizes and types that are currently difficult to detect. Particle precursors can form particles at those sizes, as demonstrated by a recent IRDS study. The industry requires proactive measures to prevent contamination and risk to yield, and, therefore, this Guide was developed to address the gap in metrology