F07500 - SEMI F75 - Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing

This Guide describes potential sources of contaminants, their impact on semiconductor manufacturing and available options for monitoring these contaminants. This Guide should be used in conjunction with SEMI F61 and SEMI F63. Together these Guides provide recommendations for facility engineers and other manufacturing and quality professionals who are responsible for establishing programs to monitor and control the quality of their ultrapure water (UPW) systems, through to point of use (POU). These Guides may be used to help determine the parameters that should be monitored for UPW that is produced, distributed, and used throughout the manufacturing facility, and the frequency and location of testing. UPW is used extensively in the production of semiconductor devices for all wet-processing steps. Ultrapure water systems need to be tested and monitored to ensure that the UPW being produced matches the specifications established by the manufacturing process. The purity of the UPW may a