F06300 - SEMI F63 - Guide for Ultrapure Water Used in Semiconductor Processing

 1  Purpose1.1  This Guide may be used:• To establish performance criteria when purchasing ultrapure water (UPW) purification equipment.• To set the process control parameters for UPW-system operation.• To establish quality expectations for the supplied UPW.NOTE 1: These suggested guidelines are published as technical information and are intended for informational purposes only.1.2  This Guide should be used in conjunction with SEMI F61 and SEMI F75. Together these Guides provide recommendations for facility engineers and other manufacturing and quality professionals who are responsible for establishing programs to specify, monitor and control the quality of their ultrapure water (UPW) systems, through to point of use (POU).2  Scope2.1  UPW is used extensively in the production of semiconductor devices for all wet-processing steps (including wafer rinsing). UPW purity is therefore critical to the manufacture of semiconductors. This Guide provides UPW quality parameters and background i