F09800 - SEMI F98 - Guide for Treatment of Reuse Water in Semiconductor Processing

 This Guide provides definitions and recommendations for design of industrial water treatment systems that reuse water in a semiconductor manufacturing facility. It is intended to establish a common basis for developing design specifications and decisions concerning planning and design of water reuse systems. This Guide also includes some considerations for the water reuse systems operation. This Guide may be used by semiconductor factory engineers and suppliers for developing site-specific basis of design and performance criteria. This Guide applies to water treatment systems designed for water reuse within semiconductor manufacturing facilities, with the purpose of supplying water for use in a variety of applications throughout the site. Such applications include directing reuse water to the front end of the ultrapure water (UPW) front end system, cooling systems, exhaust scrubbers, point of use (POU) abatement, thermal processes, and site irrigation. Choice of the reuse scheme depen