G07700 - SEMI G77 - Specification for Frame Cassette for 300 mm Wafers

The purpose of this Standard is to specify the mechanical features for a 300 mm wafer frame cassette used between the wafer mounting process and the die-bonding process.This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Only the physical interfaces for the frame cassette are specified; no materials requirements or micro-contamination limits are given. However, this Specification was written to allow for both metal and plastic frame cassette designs.Referenced SEMI Standards (purchase separately) SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm WafersSEMI E15 — Specification for 300 mm Tool Load PortSEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm WafersSEMI E57 ¾ Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer CarriersSEMI G74 ¾ Specification for Tap