P03900 - SEMI P39 - Specification for OASIS® – Open Artwork System Interchange Standard

 The purpose of this Specification is to define an interchange and encapsulation format for hierarchical integrated circuit mask layout information. Background — In the fall of 2001, SEMI’s Data Path Task Force formed a working group to define a successor to the venerable GDSII Stream format, which had served the I.C. industry as a de facto standard for layout interchange for more than two decades. The old format, limited by 16-bit and 32-bit internal integer fields, by its inefficient representation of cell-native geometric figures, and by high structural overhead, was becoming difficult to use for leading-edge designs, and file sizes were becoming unwieldy, in some cases growing to many tens of gigabytes. The successor format was chartered with several overall goals: Achieve at least an order-of-magnitude file size improvement compared to GDSII Stream. Remove all 16-bit and 32-bit integer width restrictions—make the new format fully 64-bit capable. Efficiently represent cells with la