S00900 - SEMI S9 - Guide to Electrical Design Verification Tests for Semiconductor Manufacturing Equipment that have Been Moved to SEMI S22

 The purpose of this document is to provide a permanent withdrawal notice for SEMI S9 indicating that all technical content has been incorporated within SEMI S22. 　Referenced SEMI StandardsSEMI S1 — Safety Guideline for Equipment Safety Labels SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment