S02200 - SEMI S22 - Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

This Safety Guideline provides a set of design-based electrical safety considerations for production equipment used in the semiconductor industry. Basic product safety concerns are addressed by satisfying the design, construction, and testing principles set in this Safety Guideline for protection against electrical shock or fire risk. The intent is to provide a design based electrical document that will be useful to both design engineers and evaluators, in order to facilitate electrical safety in the equipment. This Safety Guideline provides a set of design based electrical safety considerations for production equipment used in the semiconductor industry. Basic product safety concerns can be addressed by satisfying the design, construction, and testing principles set forth in this Document or by satisfying the requirements of applicable electrical safety stand