S03000 - SEMI S30 - Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes

 1  Purpose1.1  This Safety Guideline is intended as a minimum set of safety criteria for the procurement, storage, handling, and use of energetic materials in semiconductor research and development (R&D) and manufacturing processes in all phases of use, from process chemical supply through abatement.1.2  This Safety Guideline is intended to be industry best practices as of its publication date.2  Scope2.1  The scope of this Safety Guideline is energetic materials, as defined in ¶ 5.2.19 and the equipment which contains them.2.2  This Safety Guideline specifies the testing and criteria for determining whether a material is an ‘energetic material’ in the context of this Safety Guideline.2.3  This Safety Guideline also describes the minimum characterization data to be provided in research and development, pilot-line, or high-volume semiconductor manufacturing equipment.2.4  This Safety Guideline provides safety design criteria for process chemical supply, process, and post-process eq