A00200 - SEMI A5 - Specification for Factory Operation Extension for SEMI A2 SMASH (SMASH-FOX)

 * This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1  Purpose1.1  The purpose of this Standard is to provide communication interface specifications that are used as extended specifications in conjunction with SEMI A2 for factory-level operations to be used mainly for factories that have multiple assembly lines with various equipment controlled by Local Hosts as required.2  Scope2.1  The scope of this Standard is to define communication interface specifications that support factory-level operations as an extension of SEMI A2. These include:• System topology and communication path settings• Method