D08400 - SEMI D84 - Terminology for FPD Phase Shift Mask and Mask Blanks
$187.00
This Standard defines the terminology for FPD phase shift masks and mask blanks. This Standard applies to phase shift masks and mask blanks that are principally used in fabricating flat panel displays. Referenced SEMI Standards (purchase separately)None. Revision HistorySEMI D84-0823 (first published)
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