F01900 - SEMI F19 - Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www.semiviews.org and www.semi.org in August 2015; originally published in 1995; previously published March 2010. 　 The purpose of this Specification is to provide a standard for the quality of the wetted surfaces of stainless steel components used in the chemical (gas and liquid) distribution systems of semiconductor manufacturing facilities. 　 This Specification defines the wetted surface characterization requirements and the finish acceptance criteria for tubing and components fabricated in stainless steel per SEMI F20 and intended to control or contain gases and liquids used in semiconductor manufacturing. 　 The surface characterization tests to be performed are specified herein, and the existing standards for performing these tests are referenced. 　 Terms specific to this technology are