F06000 - SEMI F60 - Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 25, 2014. Available at www.semiviews.org and www.semi.org in December 2014; originally published March 2001; previously published June 2011. 　 The purpose of this Document is to define a method for testing passivated 316L stainless steel components being considered for installation into a high-purity gas distribution system. Application of this Test Method is expected to yield comparable results among components tested for the purposes of qualification for this installation. 　 This Document defines a method of testing the interior surfaces of stainless steel tubing, fittings, valves, and other components to determine the surface composition and chemistry, as a measure of the effectiveness of passivation processes. 　 The objective of this method is to describe a general set of instrument parameters and condition