M00100 - SEMI M1 - Specification for Polished Single Crystal Silicon Wafers

 1  Purpose1.1  Single crystal silicon wafers are utilized for essentially all integrated circuits and many other semiconductor devices. To permit common processing equipment to be used in multiple device fabrication lines, it is essential for the wafer dimensions to be standardized.1.2  In addition, as technology advances to smaller and smaller dimensions for the elements of high-density integrated circuits, it has become of interest to standardize additional properties of the wafers.1.3  This Specification provides the essential dimensional and certain other common characteristics of silicon wafers, including polished wafers as well as substrates for epitaxial and certain other kinds of silicon wafers.2  Scope2.1  This Specification covers ordering information and certain requirements for high-purity (electronic grade), single crystal polished silicon wafers used in semiconductor device and integrated circuit manufacturing. Such wafers are usually sliced from cylindrical single-cryst