M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers

 This Specification divides reclaimed wafers into four application categories: Mechanical, Furnace, Particle, and Lithography and provides tables of the specification requirements for each category. Thus, a prospective purchaser of reclaimed silicon wafers needs to know which application matches his or her requirements. Only requirements for some attributes are specified in Tables 1 and 2. Other requirements are indicated to be ‘customer specified’ which means that the customer may specify a requirement for that particular attribute, ‘as-supplied’ which means that the attribute has whatever value was supplied in the wafer delivered (or used) for reclaim, and ‘unspecified’ which means that the attribute is not specified and for which the wafer does not need to be tested. This Specification provides requirements for reclaimed wafers intended for use in advanced device production, including devices in the 180 and 130 nm technology generations in the third table. This Specification is dire