M07600 - SEMI M76 - Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers

This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www.semi.org in June 2010. 　 The developmental wafers covered by this specification are intended for use in research and development of process and metrology equipment and fabrication processes required for manufacturing high-density integrated circuits on 450 mm diameter single crystal silicon wafers. They can also be used to establish the techniques and metrology necessary to support a dimensional specification for 450 mm diameter circuit-quality (prime) wafers. 　 This specification covers dimensional and crystallographic orientation requirements for 450 mm diameter, polished single crystal silicon wafers needed in development. This document should be superseded by dimensional specification and technology-specific guidelines for circuit-quality wafers. 　 A complete purchase spe