M01200 - SEMI M12 - Specification for Serial Alphanumeric Marking of Silicon Wafers

 This Specification describes a coded alphanumeric marking of silicon or other semiconductor wafers. The wafer alphanumeric code links the properties of the wafer stored in an appropriate database system to each individual wafer for purposes of tracking and control during wafer and device manufacture. Use of this Specification ensures the consistency of all wafers marking performed by silicon manufacturers. This consistency allows simplification of the performance requirements of automatic optical character reading (OCR) equipment. In addition, the alphanumeric character size provides for human readability of the mark. By defining the basic code used for the mark, this Specification provides the information needed, by human or machine vision, for practical operator interpretation and wafer tracking. The alphanumeric marking of this Specification is valid for a broad range of wafer products (e.g., polished, epi, SOI, in-process and patterned wafers, etc.). This Specification defines the