M01300 - SEMI M13 - Specification for Alphanumeric Marking of Silicon Wafers

 This Specification describes an alphanumeric marking system for silicon wafers. The marking code includes information on the origin, approximate resistivity, dopant species, and crystal growth orientation in addition to a wafer identification number. Use of this Specification ensures the consistency of all wafer marking performed by silicon manufacturers. This consistency allows simplification of the performance requirements of automatic optical character reading (OCR) equipment. In addition, the alphanumeric character size provides for human readability of the mark. By defining the basic code used to characterize the individual wafer, this Specification provides the information needed for practical operator interpretation. The alphanumeric marking of this Specification is valid for a broad range of wafer products (e.g., polished, epi, SOI, in-process, and patterned wafers, etc.). This Specification defines the character set, location, and associated dimensions and tolerances of an al