M06200 - SEMI M62 - Specification for Silicon Epitaxial Wafers

This Standard was technically approved by the Silicon Wafer Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in March 2017; originally published November 2007; previously published May 2015.   NOTICE: This Standard replaced SEMI M2 and SEMI M11 in 2005. 　 Epitaxial silicon wafers are utilized for many integrated circuits and discrete semiconductor devices. To permit common processing equipment to be used in multiple device fabrication lines, it is essential for the dimensions of epitaxial wafers to be standardized. 　 In addition, as technology advances to smaller and smaller dimensions for the elements of high density integrated circuits, it has become of interest to standardize additional properties of epitaxial wafers. 　 This Specification defines and provides examples of silicon epitaxial wafer requirements for both discrete semiconductor device manu